Optoelectronics and Quantum Physics

Micro-Opto Electro Mechanical System

Microoptoelectromechanical systems (MOEMS), commonly referred to as optical MEMS, are integrations of mechanical, optical, and electrical systems that deal with sensing or modifying optical signals at a very tiny scale. A wide range of devices are included in MOEMS, such as optical switches, optical cross-connects, tenable VCSELs, and micro bolometers. These devices are typically made with silicon, silicon dioxide, silicon nitride, and gallium arsenide using micro-optics and conventional micromachining techniques.